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200 _fKENNETH.A.J
_aMaterials science and technology a comprehensive treatment V16 Processing of semiconductors/
_bLIVR
210 _cVCH
345 _b14421
675 _a621.315.5KEN
700 1 _aKENNETH.A.J
949 _a621.315.5KEN
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_mFSTM
_lSTACKS
_o.STAFF. 14421
_tLIVR
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_u10/23/2013
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_o.STAFF. 14421